Principles of Operation
Operation of DPC mass flow controllers is based on the measurement of the differential pressure across specially designed restrictor flow elements (RFE). The restrictor flow element is designed to establish laminar flow across the entire range of the instrument’s operation from 0 to 133% of full scale range. A high accuracy and high resolution differential pressure sensor is utilized to measure pressure drop across a laminar flow channel, which is linearly proportional to volumetric flow rate. To convert volumetric flow into mass flow, high accuracy and high resolution absolute pressure and temperature sensors are utilized. Based on data from the sensors and gas properties from the built-in gas database of the instrument, the micro-controller calculates volumetric and mass flow, which along with pressure and temperature parameters are available on the instrument display as well as via digital interfaces RS-232, RS-485 or optional ModBus RTU. In addition, the mass flow reading is accessible via the instrument analog interface which can be set by user to 0-5 Vdc, 0-10 Vdc or 4-20 mA mode.




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